The father of the MEMS

Harvey C. Nathanson created the first MEMS device through his development of the Resonant Gate Transistor (RGT). It was one of the key foundation stones for today’s wearable technology.

It’s difficult to define an algorithm for success,” asserts Harvey C. Nathanson. Yet he certainly achieved success. Born in 1936, Nathanson was the inventor of the electronic device that served as the foundation of MicroElectroMechanical Systems (MEMS) without which today’s wearables would not be feasible.

A life-long fascination for electrics and electronics
Nathanson was always interested in electricity and transistors. As a child, he experimented with electric power and light bulbs, blowing the odd fuse along the way. From an acquaintance who was keen on recording techniques, he learnt a lot about tubes, microphones and hi-fi systems. He ultimately turned his hobby into a career. After gaining a doctorate in electrical and electronic engineering at the Carnegie Institute of Technology (now Carnegie Mellon University), he began his career at Westinghouse Research Laboratories outside Pittsburgh, working in a research group which supported the Westinghouse Electronic Systems division and carried out many developments for the defence sector. “It was great fun working with the engineers in Baltimore,” Nathanson recalls. “They were leaders in the field of radar and electronic countermeasures, and were involved in wide-ranging projects.”

The objective: a mechanical resonator
In 1965, at the age of just 29, he was tasked by his boss, Dr William E. Newell, to develop a miniaturised tuning method for integrated circuits. Existing solutions up to that point were neither particularly small, nor did they deliver the required quality. The objective was to develop a mechanical resonator. Nathanson goes on: “The new solution had to be low-cost, of course, be producible using the available IC manufacturing technologies, and also feature input and output circuits. It was all about finding a replacement for the existing large, low-quality LC resonant circuits. Together with our technician Robert Wickstrom, I was able to develop, design and demonstrate the Resonant Gate Transistor, registering the first patents for it and putting it into sample production. Our MEMS device was the first integrated circuit featuring moveable micro-electromechanical components.”

Learning from the inventor of the MEMS
This success was made possible by the willingness of the U.S. Department of Defence to provide a sufficient budget for the necessary research. In view of that, Harvey C. Nathanson has a key piece of advice to offer future inventors: “Find a sector with enough money to invest.” He also advises anyone engaging in research to build themselves a reputation in order to be able to tap the relevant sources. And the father of MEMS stresses the importance of being published in scientific media as a vital element of that. “If you are respected in your field, you will get the funding you need – including from the government.” Building a track record of personal success engenders confidence in potential backers.
But money is not everything, of course. For someone truly looking to venture into uncharted waters, as Nathanson did back then in inventing MEMS, it is essential to have a broad-based view. So his second piece of advice to researchers is always to read a wide range of different scientific and technical journals, and keep up-to-date with findings in other fields. “That will provide a wealth of ideas and inspiration for your own work. Often, research in entirely different areas delivers solutions which you can transfer into your work, and so create completely new approaches.” A successful product needs more than just a good idea, however; it also has to deliver concrete benefit for users and customers. Harvey C. Nathanson’s philosophy is: “If you really want to develop something of benefit to users, you need partners.” He advises electronics engineers and physicists, especially, to collaborate with system experts.

Not quite retired
Harvey C. Nathanson’s invention did not make him a millionaire, since he developed MEMS as an employee of Westinghouse. He did subsequently have an exciting career in electronics, however. He became Chief Scientist responsible for electronic device work at Westinghouse Research Labs. In that role, he created further innovative defence technology solutions for Westinghouse and for Northrop Grumman, which later acquired the research group. “My role in inventing MEMS gave me a lot of freedom to do other research throughout my career,” says Nathanson. He was a founder in 2001 and continuing board member of MEMS Industry Group (MIG), now MEMS & Sensor Industry Group (MSIG) and still maintains close links with the organisation today in an Emeritus role. Nathanson finally retired in 2001 – though not entirely: he remained active as a consultant to Northrop Grumman until 2012. “Retirement isn’t for sissies,” Nathanson laughs. And so today, at 79, he still keeps himself busy. He likes to keep up with developments in the semiconductor field in particular: “I am very interested in the potential role of new ultra-miniature atomic clocks in coherent RF signal processing, for example.” And Harvey C. Nathanson is also glad to pass on his experience. He is always keen to participate in discussions on new ideas. Nonetheless: despite, having opened up an entirely new field of technology in wearables with “his” MEMS, Nathanson still sees himself as a “sensors man”, and does not use wearables – except for his iPhone 6, which he admits that he would be lost without.

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